A CRITICAL COMPARISON BETWEEN MOVPE AND MBE GROWTH OF
III-V NITRIDE SEMICONDUCTOR MATERIALS FOR OPTO-ELECTRONIC
DEVICE APPLICATIONS

ABSTRACT
A systematic study of the growth and doping of GaN, AlGaN, and InGaN by both molecular beam epitaxy (MBE) and metal-organic vapor phase epitaxy (MOVPE) has been performed. Critical differences between the resulting epitaxy are observed in the p-type doping using magnesium as the acceptor species. MBE growth, using rf-plasma sources to generate the active nitrogen species for growth, has been used for III-Nitride compounds doped either n-type with silicon or p-type with magnesium. Blue and violet light emitting diode (LED) test structures were fabricated. These vertical devices required a relatively high forward current and exhibited high leakage currents. This behavior was attributed to parallel shorting mechanisms along the dislocations in MBE grown layers. For comparison, similar devices were fabricated using a single wafer vertical flow MOVPE reactor and ammonia as the active nitrogen species. MOVPE grown blue LEDs exhibited excellent forward device characteristics and a high reverse breakdown voltage. We feel that the excess hydrogen, which is present on the GaN surface due to the dissociation of ammonia in MOVPE, acts to passivate the dislocations and eliminate parallel shorting for vertical device structures. These findings support the widespread acceptance of MOVPE, rather than MBE, as the epitaxial growth technique of choice for III-V nitride materials used in vertical transport bipolar devices for optoelectronic applications.

INTRODUCTION
The recent development of III-V Nitride semiconductor devices for optoelectronic applications has been driven by improvements in the epitaxial growth of these semiconductor materials. Heterostructures have been fabricated across a range of AlN-GaN-InN compositions with bandgaps ranging from 6.2 eV (ultraviolet) to 1.9 eV (red) for LED, laser diode, and photodetector applications [1,2]. Heterostructure epitaxy has traditionally been performed using
either MBE or MOVPE in many semiconductor material systems; however, most of the recent device application demonstrations for III-V nitrides have used MOVPE, particularly in the commercially driven work at Nichia Chemical and Cree Researc. MBE growth for optoelectronic device applications has lagged behind. Initially, this was attributed to the unavailability of an appropriate source of active nitrogen species for MBE. Through the development of nitrogen rf plasma sources for MBE, the quality of the resulting epitaxial layers has improved [7,8,9,10]. Despite these advances, demonstration of high quality vertical devices such as laser diodes or high brightness LEDs grown by MBE has not occurred. In this work, we compare the growth of III-V nitride materials by MBE and MOVPE in order to examine the fundamental differences in the epitaxial growth and the influence on resulting devices. We have studied three areas of critical importance for light emitting devices. First is the difference in the epilayer growth morphology; second is the doping of GaN with magnesium for p-type conductivity; and finally, the deposition of InGaN quantum wells with compositions in the visible emission range. This comparison provides a twofold benefit of identifying critical areas for further exploration in crystal growth and deepening the understanding of the underlying physical processes at work in successful epitaxial deposition.

EXPERIMENTAL PROCEDURE
MOVPE growth was performed in a vertical flow rotating wafer (up to 2000 rpm) system designed and built at NCSU. A radiatively heated substrate mount, of original high reliability design, can achieve temperatures up to 1200°C, as measured by an optical pyrometer. 50-mm diameter sapphire wafers were used as the base substrate with a typical low temperature GaN nucleation layer. Trimethylgallium (TMGa), trimethylaluminum (TMAl), trimethylindium (TMI) and ammonia were used as precursors with nitrogen and hydrogen carrier gases at a reactor pressure of 76 Torr. Silane and bis(cyclopentadienyl) magnesium were used as dopant sources. Growth temperatures for GaN ranged from 1060°C to 1130°C. The conditions resulted in 2D epitaxial growth at rates of 1-2 mm/hr. InGaN growth was conducted in a manner similar to Yoshimoto at temperatures from 725°C to 800°C. MBE growth was performed in an EPI Model 930 system using elemental group III and dopant sources. Rf plasma sources were used to generate the active nitrogen species. Prenucleated GaN/SiC substrates were used for the MBE deposition. Growth temperatures ranged from 750°C to 900°C for GaN and 670°C to 700°C for InGaN resulting in growth rates of 0.4-2 mm/hr. A modulated beam technique was used to grow InGaN as previously described.
The MOVPE and MBE were connected as a multichamber UHV cluster tool. This allows for the growth of sophisticated heterostructures with specific layers grown in either the MBE or MOVPE system where applicable. Characterization of epitaxial layers included: scanning electron microscopy using a JEOL JSM6400 SEM, photoluminescence (PL) using a 12 mW He-Cd laser source, and Nomarski microscopy using an Olympus BX60 microscope and image capture system. Vertical cross section samples were studied in a Topcon 002B Transmission Electron Microscope (TEM) with g=(1100) at 200 kV. LED samples were prepared following standard lithography techniques and using Ni/Au and Ti/Al as p-type and n-type contact metals, respectively.

RESULTS AND DISCUSSION
Epitaxial Layer Surface Morphology and Magnesium Doping The surface morphology of epitaxially grown GaN exhibits an obvious difference between MOVPE and MBE deposited material. As shown in the SEM micrograph in Figure 1a, undoped or n-type doped MBE grown GaN exhibits a “wormy” structure. This surface structure has been previously reported and the degree of texture can be minimized, although not eliminated, through changes in the nitrogen plasma source operating conditions. The MOCVD grown undoped material is smooth and uniform as shown in Figure 1b. Magnesium was used as a p-type dopant for both MBE and MOVPE grown of GaN. For MOVPE growth, the surface of p-type material is smooth and featureless. However, in MBE growth, there is a dramatic change in surface texture with the evolution of a faceted surface with increasing magnesium flux as shown in Figures 1c and 1d. Cross sectional TEM studies revealed the facet morphology to be related to the pre-existing dislocation structure.